| 直流偏置对PZT微传感器的谐振频率的影响 |
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| 引用本文： | 王军军,周嘉,黄宜平. 直流偏置对PZT微传感器的谐振频率的影响[J]. 传感器与微系统, 2005, 24(4): 26-28 |
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| 作者姓名： | 王军军 周嘉 黄宜平 |
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| 作者单位： | 复旦大学,微电子系专用集成电路与系统国家重点实验室,上海,200433 |
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| 摘 要： | 在直流偏置电压对PZT压电微悬臂梁谐振频率的影响研究中,建立了理论方程,并通过激光干涉测试实验对所建方程进行了验证。理论方程和实验均表明:直流偏置电压对PZT微悬臂梁的谐振基频的影响是二阶函数。在直流偏置电场小于1×107 V/m时,直流偏置电压和谐振基频存在线性变化区。此结论可以用于改善谐振式PZT微悬臂梁传感器的信号检测系统,即利用扫描直流偏置电压取代频谱分析。
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| 关 键 词： | 直流偏置电压 锆钛酸铋 谐振频率 |
| 文章编号： | 1000-9787(2005)04-0026-03 |
| 修稿时间： | 2004-09-28 |
Effect on resonant frequency of PZT micro-sensor by DC voltage |
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| WANG Jun-jun,ZHOU Jia,HUANG Yi-ping. Effect on resonant frequency of PZT micro-sensor by DC voltage[J]. Transducer and Microsystem Technology, 2005, 24(4): 26-28 |
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| Authors: | WANG Jun-jun ZHOU Jia HUANG Yi-ping |
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| Abstract: | The affect of the DC voltage on the PZT piezoelectric micro-cantilever’ s resonant frequency is researched,and the analytic functions are built.At the same time,the laser interference experiment confirms the analytic functions.Both the analytic functions and the experiment explain that the relation between the DC voltage and the resonant frequency’ s change is two ordered.When the DC filed is below 1×10~7V/m,the linear zone exists.This result can benefit to improve the output signal collecting system.This means that the frequency analyzer can be replaced by DC voltage scanning. |
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| Keywords: | DC voltage PZT(Pb(Zr_xTi_(1-x))O_3) resonant frequency |
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