| 多元气体配气仪设计及精度分析 |
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| 引用本文： | 黄一祥,曾周末,靳世久,黄四萍. 多元气体配气仪设计及精度分析[J]. 现代科学仪器, 2009, 0(3): 44-47 |
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| 作者姓名： | 黄一祥 曾周末 靳世久 黄四萍 |
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| 作者单位： | 1. 天津大学精密测试技术与仪器国家重点实验室,天津,300072
2. 南宁化工股份有限公司,南宁,530031 |
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| 摘 要： | 提出了一种基于高精度质量流量控制器的动态配气方案,并给出了系统操作时序流程图。着重阐述配制标准气体原理、配气过程中的不确定度及其改善措施。针对气体流量控制的时变非线性、难以建立数学模型的特点,采用模糊控制算法对气体流量进行控制,提高了配气精度。该系统可连续配制、并供给浓度值连续可调的多元混合标准气体。
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| 关 键 词： | 多元气体 质量流量控制器 不确定度 模糊控制算法 |
A Design of Multiple Gas Distributing Instrument and Precision Analysis |
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| Huang Yi-xiang,Zen Zhou-mo,Jin Si-jiu,Huang Si-ping. A Design of Multiple Gas Distributing Instrument and Precision Analysis[J]. Modern Scientific Instruments, 2009, 0(3): 44-47 |
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| Authors: | Huang Yi-xiang Zen Zhou-mo Jin Si-jiu Huang Si-ping |
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| Affiliation: | Huang Yi-xiang, Zen Zhou-mo, Jin Si-jiu,Huang Si-ping (State Key Lab. of Precision Measuring Technology＆Instrumentsl,Tianjin University,Tianjin 300072,China NanNing Chemical Industry CO.,LTD2.530031 ) |
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| Abstract: | This paper has put forward a dynamic multiple gas distributing scheme based on mass flow controller, and presented the system＇s operation flow chart. The paper emphasize on distributing standard gas elements, the cause of multiple gas distributing uncertainty and the way to reduce the uncertainty. Because of the gas control time-varying nonlinear and difficult to build up the Mathematical model, the system uses fuzzy control algorithm to control the gas flow. The instrument can confect continuously the multiple gas concentration and can be adjusted continuously. |
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| Keywords: | Multiple gas Mass flow controller.. Uncertainty Fuzzy control algorithm |
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