| 双波长激光量块干涉仪减小量块中心长度测量不确定度的措施 |
| |
| 引用本文： | 蒋秀兰,祝逸庆,马建敏,傅云霞,蔡明钢,葛爱明,王青,陈磊.双波长激光量块干涉仪减小量块中心长度测量不确定度的措施[J].上海计量测试,2010,37(6):27-29. |
| |
| 作者姓名： | 蒋秀兰 祝逸庆 马建敏 傅云霞 蔡明钢 葛爱明 王青 陈磊 |
| |
| 作者单位： | [1]上海市计量测试技术研究院 [2]南京理工大学电光学院 |
| |
| 摘 要： | 该文总结了双波长激光干涉仪研制过程中减小量块中心长度测量不确定度的几项重要措施,该干涉仪对量块中心长度的测量不确定度达到(0.02±0.2L)μm,并已成功应用于高等级量块的自动测量。
|
| 关 键 词： | 量块 激光干涉仪 测量不确定度 |
Several measures for reducing the uncertainty of measurement on developing of the laser interferometer for gauge block measurement with double wavelengths |
| |
| Jiang Xiulan,Zhu Yiqing,Ma Jianming,Fu Yunxia,Cai Minggang,Ge Aiming,Wang Qing,Chen Lei.Several measures for reducing the uncertainty of measurement on developing of the laser interferometer for gauge block measurement with double wavelengths[J].Shanghai Meassurement and Testing,2010,37(6):27-29. |
| |
| Authors: | Jiang Xiulan Zhu Yiqing Ma Jianming Fu Yunxia Cai Minggang Ge Aiming Wang Qing Chen Lei |
| |
| Affiliation: | 1.Shanghai Institute of Measurement and Testing Technology;2.Nanjing University of Science and Technology) |
| |
| Abstract: | This paper summarizes several important measures for reducing the uncertainty of measurement in the process of developing the laser interferometer for gauge block measurement with double wavelengths.The interferometer achieves the measurement uncertainty of （0.02＋0.2L）μm for measurement of central lengths of gauge blocks and has be successfully used to the automatic measurement of the high-grad gauge blocks. |
| |
| Keywords: | gauge blocks laser interferometer uncertainty of measurement |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
