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热处理方法改善CdZnTe晶体性能研究
引用本文:闵嘉华,桑文斌,刘洪涛,钱永彪,滕建勇,樊建荣,李万万,张斌,金玮.热处理方法改善CdZnTe晶体性能研究[J].稀有金属材料与工程,2007,36(3):471-474.
作者姓名:闵嘉华  桑文斌  刘洪涛  钱永彪  滕建勇  樊建荣  李万万  张斌  金玮
作者单位:上海大学材料科学与工程学院电子信息材料系,上海,200072
基金项目:国家自然科学基金;上海市教委资助项目;上海先进学院校科研和教改项目
摘    要:对电阻率为10^3-6Ω·cm的In掺杂Cd0.9Zn0.1Te晶片在Te气氛和Cd/Zn平衡蒸汽压下进行了热处理,对电阻率为10^8-9Q·cm的非掺杂晶片则在In气氛和Cd/Zn平衡蒸汽压下进行了热处理。结果表明,In掺杂Cd0.9Zn0.1Te晶片经处理后电阻率可提高3个数量级。非掺杂晶片在In气氛中热处理可很容易地改变导电类型,在热处理温度700℃,In分压6.1×10^-4Pa,退火时间达48h后,电阻率可以提高到2.6×10^9Ω·cm。

关 键 词:CdZnTe热处理  Cd/Zn平衡分压  In扩散
文章编号:1002-185X(2007)03-0471-04
修稿时间:2006-01-06

Improving the Properties of CdZnTe Crystals by Annealing Processes
Min Jiahu,Sang Wenbin,Liu Hongtao,Qian Yongbiao,Teng Jianyong,Fan Jianrong,Li Wanwan,Zhang Bin,Jin Wei.Improving the Properties of CdZnTe Crystals by Annealing Processes[J].Rare Metal Materials and Engineering,2007,36(3):471-474.
Authors:Min Jiahu  Sang Wenbin  Liu Hongtao  Qian Yongbiao  Teng Jianyong  Fan Jianrong  Li Wanwan  Zhang Bin  Jin Wei
Affiliation:Department of Electronic Information Materials, School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
Abstract:The as-grown In-doped Cd0.9Zn0.1Te wafers of ρ about 103~6 Ω·cm were annealed in Te atmosphere under Cd/Zn equilibrium pressures and the as-grown non-doped Cd0.9Zn0.1Te wafers of ρ about 108~9 Ω·cm were annealed under In+Cd/Zn equilibrium pressures. The results show that for the In-doped annealed wafer, the resistivity could be raised by three orders.And it is found that the conductivity type of the non-doped CZT wafers could be changed easily during the In vapor phase annealing process, and the resistivity of the wafer could be raised up to 2.6 × 109 Ω·cm when it was annealed at 700℃ under the In pressure of 6.1 × 10-4 Pa for 48 h.
Keywords:Cd0  9Zn0  1Te annealing  Cd/Zn equilibrium pressures  Te pressure  In pressure  In-deposition
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