Improvement of magnetic characteristics and electrical properties of FeCoHfO/AlOx multilayered films |
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Authors: | Yu-Ming Kuo Jenq-Gong Duh |
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Affiliation: | a Department of Material Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan, ROC b Delta Electronics, INC. 252 Shangying Road, Guishan Industrial Zone, Taoyuan County 33341, Taiwan, ROC |
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Abstract: | High permeability magnetic films can enhance the inductance of thin-film inductors in DC-DC converters. In order to obtain high permeability, effective uniaxial anisotropic field should be as low as possible. A multilayered technique (laminating the magnetic layers with oxide spacers) was exploited to improve the magnetic properties of thick films. The FeCoHfO/AlOx multilayered films were fabricated by dc reactive magnetron sputtering. Inserting an insulator (AlOx) layer can decrease the magneto-elastic anisotropy by reducing the residual stress of the FeCoHfO magnetic films. The anisotropic field and resistivity of the FeCoHfO/AlOx multilayered films were evidently improved by multilayered coating. With this optimum configuration of 9 layers structure [FeCoHfO (133 nm)/AlOx (10 nm)]9, low anisotropic field (HK = 65 Oe) and high resistivity (ρ ∼ 1350) μΩ cm were achieved. |
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Keywords: | Multilayer structure Nanocomposites Magnetic materials |
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