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Ion-beam-deposited boron carbide coatings for the extreme ultraviolet |
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| Authors: | Blumenstock G M Keski-Kuha R A |
| Abstract: | The normal-incidence reflectance of ion-beam-deposited boron carbide thin films has been evaluated in the extreme ultraviolet (EUV) spectral region. High-reflectance coatings have been produced with reflectances greater than 30% between 67 and 121.6 nm. This high reflectance makes ion-beam-deposited boron carbide an attractive coating for EUV applications. |
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