碳化硅真空烧结炉温度场数值模拟与系统优化

为了提高碳化硅真空烧结炉加热系统的加热效率和温度均匀性,以ZSD4.5-1150C真空高温烧结炉为参考建模,采用Ansys Fluent软件、DO辐射模型,模拟了空载状态下真空烧结炉的瞬态温度分布规律,并与实测数据进行对比,最大误差在10%以内。在此基础上,进一步研究加热速率、加热管直径、加热管与有效加热区间距对加热系统温度分布特性及加热效率的影响,并对加热系统进行优化。结果表明,适当增大加热速率和加热管直径,可有效提高加热系统的加热效率和温度均匀性,加热管与有效加热区间距对加热系统性能影响不大;具体优化方案为加热速率9 K/min、加热管直径ø45 mm、加热管与有效加热区间距50 mm,优化后系统加热时间减少了60 min,加热效率提高了30%,温度均匀性满足工艺要求。

Numerical simulation and system optimization of temperature field in silicon carbide vacuum sintering furnace

In order to improve the heating efficiency and temperature uniformity of the heating system of silicon carbide vacuum sintering furnace, the ZSD4.5-1150C vacuum high temperature sintering furnace was used as a reference model, the Ansys Fluent software and DO radiation model were used to simulate the transient temperature distribution of vacuum sintering furnace under no-load condition, and compared with the measured data, the maximum error was within 10%. On this basis, effects of heating rate, diameter of heating tube and distance between heating tubes and effective heating zone on temperature distribution characteristics, and heating efficiency of the heating system were further studied, and the heating system was optimized. The results show that the heating efficiency and temperature uniformity of the heating system can be effectively improved by appropriately increasing the heating rate and the diameter of the heating tube. But the distance between the heating tubes and effective heating zone has little effect on the performance of the heating system. The specific optimization scheme is the heating rate of 9 K/min, the diameter of the heating tube of ø45 mm, and the distance between the heating tubes and the effective heating area of 50 mm. After the optimization, the heating time of the system is reduced by 60 min, the heating efficiency is increased by 30%, and the temperature uniformity meets the process requirements.