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非晶/纳米晶TiB2薄膜的制备及其电化学性能研究
引用本文:潘小静,徐江,沈凯,刘林林. 非晶/纳米晶TiB2薄膜的制备及其电化学性能研究[J]. 电子器件, 2012, 35(2): 135-138
作者姓名:潘小静  徐江  沈凯  刘林林
作者单位:南京航空航天大学材料科学与技术学院,南京,210016
基金项目:江苏省自然基金项目(BK2010073)
摘    要:通过双层辉光离子渗表面处理技术,在纯Ti基体上制备了非晶/纳米晶TiB2及Ti(Al)B2薄膜。利用X射线衍射(XRD)和透射电子显微镜(TEM)观察薄膜的微观组织特征。运用动电位极化及交流阻抗谱(EIS)的电化学方法,研究薄膜试样在3.5 wt.%NaCl溶液中的电化学特性。结果表明:制备的薄膜试样大大提高了纯Ti基体耐蚀性能,Al元素的加入稍微降低了薄膜的耐蚀性,但仍优于基体材料。

关 键 词:非晶/纳米晶  耐蚀性能  动电位极化  交流阻抗谱

Preparation and corrosion resistance of TiB2 amorphous-nanocrystalline films
PAN Xiaojing , SHEN Kai , XU Jiang , LIU Linlin. Preparation and corrosion resistance of TiB2 amorphous-nanocrystalline films[J]. Journal of Electron Devices, 2012, 35(2): 135-138
Authors:PAN Xiaojing    SHEN Kai    XU Jiang    LIU Linlin
Affiliation:(College of Material Science and Technology,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)
Abstract:The amorphous-nanocrystalline TiB2 and Ti(Al)B2 films were prepared on pure Ti substrate by double glow discharge plasma technique.The microstructures of films were studied by X-ray diffractrometry and transmission electron microscopy(TEM).The corrosion behaviour of films had been characterised by potentiodynamic polarization and electrochemical impedance spectroscopy(EIS)in 3.5 wt.% NaCl solution.The results revealed that the corrosion resistance of the amorphous-nanocrystalline TiB2 films was improved.Corrosion resistance of film can be decreased by adding Al element,but still better than the substrate.
Keywords:amorphous-nanocrystalline  corrosion resistance  potentiodynamic polarization  EIS
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