| ELGA全自动超纯水处理系统的工艺和设备特点 |
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| 引用本文： | 张卫平.ELGA全自动超纯水处理系统的工艺和设备特点[J].微电子学,1988(2). |
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| 作者姓名： | 张卫平 |
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| 作者单位： | 电子部二十四所 |
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| 摘 要： | 在集成电路工业已经进入超大规模集成电路时代的今天,如何使超纯水这一重要基础材料的纯度达到电子级Ⅰ级水准,已成为我国净化技术中超纯水处理领域一个急待解决的技术问题。本文专题介绍英国ELGA公司全自动超纯水处理系统工艺流程和设备的特点,最后介绍了该系统生产的超纯水所达到的质量指标。
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| 关 键 词： | 超纯水 水处理 反渗透 净化技术 |
Process and Equipment Characteristics of the Elga's Fully-automated Ultrapure Water Treatment System |
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| Zhang Weiping.Process and Equipment Characteristics of the Elga's Fully-automated Ultrapure Water Treatment System[J].Microelectronics,1988(2). |
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| Authors: | Zhang Weiping |
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| Affiliation: | Sichuan Solid siate Ciruits Research Institute |
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| Abstract: | With the development of very large scale integrated circuits in the semiconductor industry, how to make the purity of ultra pure water, an important basic material, meet the standard of the Electronic Grade (Grade I )has become a pressing technical problem in the ultra-pure water treatment. This paper introduces specifically the process and equipment characteristics of the Elga's fully-automated ultra-pure water treatment system. Finally, the specifications of quality for the ultrapure water from this system are given. |
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| Keywords: | Ultrapure water Water treatment Reverse osimsis Cleaning technique |
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