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Obtaining Electrically Conductive Structures by Electrochemical Deposition of Copper onto Substrates of Anodized Aluminum Using Polyfluorochalcones as a Photoresist Layer |
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| Authors: | Derevyashkin S. V. Soboleva E. A. Shelkovnikov V. V. |
| Affiliation: | 1.Novosibirsk Institute of Organic Chemistry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia ;2.Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia ;3.Novosibirsk State Technical University, 630073, Novosibirsk, Russia ; |
| Abstract: | Russian Microelectronics - The approaches used to the form electrically conductive structures on aluminum and anodized aluminum substrates using such photoresists as synthesized triacrylamide... |
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