| 等离子体基高温离子注入研究进展 |
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| 引用本文： | 孙跃,陈继新,夏立芳,刘鑫贵,徐淑艳. 等离子体基高温离子注入研究进展[J]. 材料热处理学报, 2001, 22(3): 55-61 |
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| 作者姓名： | 孙跃 陈继新 夏立芳 刘鑫贵 徐淑艳 |
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| 作者单位： | 哈尔滨工业大学材料科学与工程学院 |
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| 摘 要： | 综述了等离子体基高温离子注入的发展及应用情况,介绍了由于高温注入中辐照增强扩散和热扩散的共同作用,注入层成分、组织结构、力学性能和抗腐蚀性能随温度提高发生的变化.并对今后的发展趋势作了预测.
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| 关 键 词： | 等离子体基离子注入 升温 扩散 组织和性能 |
| 文章编号： | 1009-6264(2001)03-0055-07 |
| 修稿时间： | 2000-12-08 |
Progress in Research of Plasma-Based Ion Implantation at Elevated Temperature |
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| SUN Yue,CHEN Jixin,XIA Lifang,LIU Xingui,XU Shuyan. Progress in Research of Plasma-Based Ion Implantation at Elevated Temperature[J]. Transactions of Materials and Heat Treatment, 2001, 22(3): 55-61 |
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| Authors: | SUN Yue CHEN Jixin XIA Lifang LIU Xingui XU Shuyan |
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| Abstract: | The developments and applications of plasma based ion implantation (PBII) at elevated temperature are reviewed. Because of radiation and thermal enhancement to diffusion, the composition, structure, mechanical and corrosion properties of the implanted layer change dramatically with increasing temperature. Regularities obtained by far are summarized. And further research efforts are also briefly prospected. |
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| Keywords: | plasma based ion implantation (PBII) elevated temperature diffusion microstructure and property |
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