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Spectroscopic ellipsometric determination of optical properties of V-Al co-doped ZnO films by rf magnetron sputtering
Authors:A Sayari  L El Mir  S Al-Heniti  E Shalaan  S J Yaghmour  S A Al-Thabaiti  A A Al-Ghamdi  F Yakuphanoglu
Affiliation:1. Department of Physics, Faculty of Science, King Abdulaziz University, North Jeddah Branch, Jeddah, Saudi Arabia
2. College of Sciences, Department of Physics and chemistry, Al Imam Mohammad Ibn Saud Islamic University, Riyadh, 11623, Saudi Arabia
3. Department of Physics, Faculty of Science, King Abdulaziz University, Jeddah Branch, P.O. Box 80203, Jeddah, 21589, Saudi Arabia
4. Department of Physics, Faculty of Science, Firat University, Elazig, 23169, Turkey
Abstract:Zn0.9?xV0.1AlxO aerogel nanopowders were prepared in thin film form on glass substrates using a rf magnetron sputtering system. The films were characterized by Scanning electron microscopy (SEM) and X-ray diffraction technique (XRD). The XRD results indicate that all the films have c-axis preferred orientation due to self-texturing mechanism. The ellipsometric spectra of the films were recorded in the photon energy range of 1 eV–5 eV. The SE spectra were analyzed with an appropriate model to accurately determine the thickness and optical constants of the ZnO:(V,Al) thin films. The profiles of refractive index and extinction coefficient with photon energy were extracted. The refractive index of the ZnO:(V,Al) film is decreased from 2.14 to 2.07 with increasing Al concentration and then is increased to 2.19 for x?=?0.04. A maximum band gap energy of ~3.57 eV was obtained for x?=?0.02. The optical band gaps of the films were found to vary from 3.57 eV to 3.41 eV, with Al content. It is evaluated that the optical constants of the ZnO:(V,Al) films can be controlled by Al content.
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