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| 薄膜太阳电池用TCO薄膜制造技术及其特性研究 | |
| 引用本文： | 陈新亮,王斐,闫聪博,李林娜,林泉,倪牮,张晓丹,耿新华,赵颖.薄膜太阳电池用TCO薄膜制造技术及其特性研究[J].材料导报,2011,25(18):73-77. |
| 作者姓名： | 陈新亮 王斐 闫聪博 李林娜 林泉 倪牮 张晓丹 耿新华 赵颖 |
| 作者单位： | 1. 南开大学光电子薄膜器件与技术研究所,天津,300071 2. 南开大学光电子薄膜器件与技术天津市重点实验室,天津,300071 3. 南开大学光电信息技术科学教育部重点实验室,天津,300071 |
| 基金项目： | 国家重点基础研究发展计划(2011CBA00705;2011CBA00706;2011CBA00707); 国家高技术研究发展计划(2009AA050602); 天津市应用基础及前沿技术研究计划(09JCYBJC06900); 中央高校基本科研业务费专项资金项目(65010341) |
| 摘 要： | 阐述了玻璃衬底、柔性衬底透明导电氧化物薄膜(Transparent conductive oxides-TCO)以及硅基薄膜太阳电池应用方面的最新研究成果。绒面结构可以提高薄膜太阳电池效率和稳定性并降低生产成本。磁控溅射技术和LP-MOCVD技术是制造绒面结构ZnO-TCO薄膜(例如"弹坑"状和"类金字塔"状表面)的主流生长技术;高迁移率TCO薄膜(IMO、IWO、ZnO∶Ga等)以及柔性衬底TCO薄膜是研究开发的重点。 |
| 关 键 词： | 镀膜技术 TCO薄膜 绒面结构 高迁移率 缓冲层 梯度掺杂 薄膜太阳电池 |
Research on the Fabrication Technology and Characteristics for TCO Thin Films Applied in Thin Film Solar Cells |
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| CHEN Xinliang,WANG Fei,YAN Congbo,LI Linna,LIN Quan,NI Jian,ZHANG Xiaodan,GENG Xinhua,ZHAO Ying.Research on the Fabrication Technology and Characteristics for TCO Thin Films Applied in Thin Film Solar Cells[J].Materials Review,2011,25(18):73-77. | |
| Authors: | CHEN Xinliang WANG Fei YAN Congbo LI Linna LIN Quan NI Jian ZHANG Xiaodan GENG Xinhua ZHAO Ying |
| Affiliation: | CHEN Xinliang,WANG Fei,YAN Congbo,LI Linna,LIN Quan,NI Jian,ZHANG Xiaodan,GENG Xinhua,ZHAO Ying(Institute of Photo-electronic Thin Film Devices and Technology,Nankai University,Tianjin 300071,Tianjin Key Laboratory of Photo-electronic Thin Film Devices and Technology,Key Laboratory of Opto-electronic Information Science and Technology for Ministry of Education,Tianjin 300071) |
| Abstract: | The up-to-date experiment progresses in TCO thin films on glass and flexible substrates and their applications for Si-based thin film solar cells were presented.Textured surface with good light scattering can improve the solar cells efficiency,stability and reduce the production costs.Magnetron sputtering and LP-MOCVD are the main fabrication technology for textured ZnO-TCO thin films.TCO thin films(IMO,IWO,ZnO∶Ga) with high mobility and these thin films on the flexible substrates have become the key issues. |
| Keywords: | thin-films fabrication technology TCOs textured surface high mobility buffer layers gradual doping growth thin film solar cells |
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