| 固体电解质CO_2传感器的研究与进展 |
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| 引用本文： | 全宝富,何月华,王彪,梁喜双,钟铁钢.固体电解质CO_2传感器的研究与进展[J].微纳电子技术,2007(Z1). |
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| 作者姓名： | 全宝富 何月华 王彪 梁喜双 钟铁钢 |
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| 作者单位： | 吉林大学电子科学与工程学院 长春130012 |
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| 基金项目： | 国家自然科学基金资助项目(60574096) |
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| 摘 要： | 采用溶胶-凝胶法制备NASICON粉体材料,并利用XRD和IR对制得的材料进行表征。以NASICON粉体材料为基体,Li2CO3-BaCO3复合盐为敏感电极制作管式CO2气体传感器,并对其灵敏度、选择性和耐水性进行测量。在敏感电极中掺入质量分数为10%的SiO2,不仅明显改善器件的耐水性,而且使器件的初始稳定时间从30min减小到5min。
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| 关 键 词： | NASICON CO2 SiO2 耐水性 |
Research and Development of Solid-Electrolyte CO_2 Sensor |
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| QUAN Bao-fu,HE Yue-hua,WANG Biao,LIANG Xi-shuang,ZHONG Tie-gang.Research and Development of Solid-Electrolyte CO_2 Sensor[J].Micronanoelectronic Technology,2007(Z1). |
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| Authors: | QUAN Bao-fu HE Yue-hua WANG Biao LIANG Xi-shuang ZHONG Tie-gang |
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| Abstract: | NASICON(Na superionic conductor) powders were synthesized by sol-gel method.The resulting materials were characterized by means of XRD and IR.The tube-type CO2 gas sensor was fabricated.NASICON paste was coated on Al2O3 tube as electric layer and Li2CO3BaCO3 was used as sensing electrode.The sensitivity,selectivity and humid resistance of the CO2 gas sensor were investigated.After the sensing electrode was modified with SiO2(10%),the steady time of the sensor could be greatly reduced from 30 min to 5 min and the humid resistance of the sensor were improved. |
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| Keywords: | NASICON CO2 SiO2 humid resistance |
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