Affiliation: | (1) Materials Application Department, Toshiba Research and Development Center, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa-ken, Japan;(2) Semiconductor Industrial Engineering Department, Semiconductor Division, Toshiba Corporation, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki-shi, Kanagawa-ken, Japan |