| 微小流量传感器的数值模拟 |
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| 引用本文： | 沈克强 童勤义. 微小流量传感器的数值模拟[J]. 固体电子学研究与进展, 1993, 13(1): 18-24 |
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| 作者姓名： | 沈克强 童勤义 |
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| 作者单位： | 东南大学微电子中心，东南大学微电子中心 南京 210018，南京 210018 |
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| 基金项目： | 国家教委博士点基金资助项目(9028611) |
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| 摘 要： | 给出了微小流量传感器的数值模型,并进行了数值模拟。数值模型表明流体前端与末端两端点间距是提高传感器灵敏度的关键因素,数值模拟结果为微小流量传感器设计提供了两端点最佳间距。
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| 关 键 词： | 传感器 数值模型 热边界层 |
The Simulation of Micro-Mass Flow Sensor |
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| Shen Keqiang,Tong Qinyi. The Simulation of Micro-Mass Flow Sensor[J]. Research & Progress of Solid State Electronics, 1993, 13(1): 18-24 |
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| Authors: | Shen Keqiang Tong Qinyi |
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| Abstract: | The numerical model and simulated results of a micro-mass flow sensor have been presented in this paper and they show that the distance between the upstream and downstream of the flow is very important to the sensitivity of the micro-mass flow sensor and provide the perfect distance for the device design. |
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| Keywords: | Sensor Numerical Model Thermal Boundary Layer |
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