| 一种微型隧道效应磁强计的设计 |
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| 引用本文： | 朱俊华,丁衡高,叶雄英.一种微型隧道效应磁强计的设计[J].仪表技术与传感器,2000(8):16-17,34. |
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| 作者姓名： | 朱俊华 丁衡高 叶雄英 |
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| 作者单位： | 清华大学精密仪器系北京市 100084 |
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| 摘 要： | 隧道效应传感器是一种灵敏度很高的位移传感器，其原理已经被用于微加速度计和红外传感器的设计。文中介绍了基于这一原理的微型磁强计，对传感器的固有频率和驱动电压进行了分析和计算。
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| 关 键 词： | MEMS 隧道效应磁强计 设计 |
The Design of a Micro Tunnel Magnetometer |
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| Zhu Junhua Ding Henggao Ye Xiongying Dept.of Precision Instruments,Tsinghua University,Beijing.The Design of a Micro Tunnel Magnetometer[J].Instrument Technique and Sensor,2000(8):16-17,34. |
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| Authors: | Zhu Junhua Ding Henggao Ye Xiongying Deptof Precision Instruments Tsinghua University Beijing |
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| Affiliation: | Zhu Junhua Ding Henggao Ye Xiongying Dept.of Precision Instruments,Tsinghua University,Beijing 100084 |
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| Abstract: | The sensor based on tunnel effect is a kind of highly sensitive displacement and its nsducer,the principle has been applied in the design of accelecrometer and infrared sensors.This paper introduces the micro magnetometer and analyses the natural frequency and driving voltage of the sensor as well. |
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| Keywords: | MEMS Tunnel Effect Magnetometer |
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