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| 基底亚表面裂纹对减反射膜激光损伤阈值的影响 | |
| 引用本文： | 杨明红,赵元安,苏涵韩,单海洋,易葵,邵建达.基底亚表面裂纹对减反射膜激光损伤阈值的影响[J].中国激光,2012,39(8):807001-159. |
| 作者姓名： | 杨明红 赵元安 苏涵韩 单海洋 易葵 邵建达 |
| 作者单位： | 杨明红:中国科学院上海光学精密机械研究所强激光材料重点实验室， 上海 201800中国科学院研究生院， 北京 100049 赵元安:中国科学院上海光学精密机械研究所强激光材料重点实验室， 上海 201800 苏涵韩:中国科学院上海光学精密机械研究所强激光材料重点实验室， 上海 201800中国科学院研究生院， 北京 100049 单海洋:中国科学院上海光学精密机械研究所强激光材料重点实验室， 上海 201800中国科学院研究生院， 北京 100049 易葵:中国科学院上海光学精密机械研究所强激光材料重点实验室， 上海 201800 邵建达:中国科学院上海光学精密机械研究所强激光材料重点实验室， 上海 201800 |
| 基金项目： | 国家自然科学基金(60878045)资助课题。 |
| 摘 要： | 利用化学沥滤技术,分析了亚表面裂纹对基底表面和减反射膜激光损伤阈值(LIDT)的影响。通过去除或保留研磨裂纹,获得了亚表面裂纹数密度有明显区别的两类基底。为了凸出亚表面裂纹层的作用,基底采用化学沥滤去除另外一种可能的影响因素,即再沉积层中的抛光杂质。然后采用电子束蒸发镀制HfO2/SiO2减反射膜。355nm激光损伤阈值测试结果和损伤形貌分析证实了基底亚表面裂纹对减反射膜抗激光损伤能力的负面影响。根据熔石英基底抛光表面的烘烤现象,提出了亚表面缺陷影响膜层激光损伤的耦合模型。 |
| 关 键 词： | 薄膜 激光损伤 化学沥滤 减反射膜 亚表面缺陷 研磨裂纹 |
| 收稿时间： | 2012/4/6 |
Influence of Subsurface Cracks on the Laser Damage Resistance of Anti-Reflection Coated Fused Silica |
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| Yang Minghong,Zhao Yuan′an,Su Hanhan,Shan Haiyang,Yi Kui,Shao Jianda.Influence of Subsurface Cracks on the Laser Damage Resistance of Anti-Reflection Coated Fused Silica[J].Chinese Journal of Lasers,2012,39(8):807001-159. | |
| Authors: | Yang Minghong Zhao Yuan′an Su Hanhan Shan Haiyang Yi Kui Shao Jianda |
| Affiliation: | 1Key Laboratory of Materials for High Power Laser,Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Shanghai 201800,China 2Graduate University of Chinese Academy of Sciences,Beijing 100049,China |
| Abstract: | The impact of subsurface cracks on the laser damage resistance of bare and anti-reflection (AR) coated fused silica are experimentally investigated using chemical leaching. Two kinds of substrates with the subsurface cracks number density of obviously different are obtained by retaining or removing the grinding cracks. To highlight the effect of the subsurface cracks, the photoactive impurities in the polishing layer, as a competing damage mechanism, are minimized by chemical leaching. Then the HfO2/SiO2 anti-reflection coatings are deposited by electron beam evaporation. 355 nm laser-induced damage threshold (LIDT) test results and damage morphology analysis verifie the negative effect of subsurface cracks on the LIDT of AR coated surfaces. According to the heating morphology of polished fused silica surface, a coupling model between the subsurface defects of substrate and the laser damage of coatings is proposed. |
| Keywords: | thin films laser damage chemical leaching anti-reflection coating subsurface defects grinding cracks |
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