| 掺Ti量对类金刚石薄膜机械性能的影响 |
| |
| 引用本文： | 祝闻,冉春华,金义栋,聂朝胤,王振林.掺Ti量对类金刚石薄膜机械性能的影响[J].表面技术,2012(5):7-10. |
| |
| 作者姓名： | 祝闻 冉春华 金义栋 聂朝胤 王振林 |
| |
| 作者单位： | 西南大学材料科学与工程学院;重庆理工大学材料科学与工程学院 |
| |
| 基金项目： | 重庆市科技攻关项目(CSTC,2008AC4017) |
| |
| 摘 要： | 采用非平衡磁控溅射技术,通过改变Ti靶溅射电流,在不锈钢衬底表面沉积了不同掺Ti量的类金刚石薄膜(Ti-DLC),研究了掺Ti量对薄膜的显微硬度、弹性模量、膜/基结合强度、断裂韧性及摩擦磨损行为的影响。结果表明:DLC薄膜掺杂Ti后,硬度明显提高,且随着Ti靶溅射电流的增大,薄膜硬度先增加、后降低,Ti靶溅射电流为1.5A时,薄膜硬度最高;掺杂适量的Ti,可以明显改善DLC薄膜的膜/基结合强度和断裂韧性,并能明显降低DLC薄膜的摩擦系数。
|
| 关 键 词： | 非平衡磁控溅射 掺Ti类金刚石薄膜 结合强度 摩擦磨损性能 |
| 收稿时间： | 2012/6/15 0:00:00 |
| 修稿时间： | 2012/10/20 0:00:00 |
The Effect of Ti Content on Mechanical Properties of DLC Films |
| |
| ZHU Wen,RAN Chun-hu,JIN Yi-dong,NIE Chao-yin and WANG Zhen-lin.The Effect of Ti Content on Mechanical Properties of DLC Films[J].Surface Technology,2012(5):7-10. |
| |
| Authors: | ZHU Wen RAN Chun-hu JIN Yi-dong NIE Chao-yin and WANG Zhen-lin |
| |
| Affiliation: | 1.School of Materials Science and Engineering,Southwest University,Chongqing 400715,China; 2.School of Materials Science and Engineering,Chongqing University of Technology,Chongqing 400050,China) |
| |
| Abstract: | Using unbalanced magnetron sputtering technique, diamond-like carbon films with different titanium contents(Ti-DLC)were deposited on stainless steel substrates by changing Ti target supttering current. Investigated the influences of Ti content on microhardness, elastic modulus, film-substrate cohesion, fracture toughness, friction and wear behavior of films. Results showed that the hardness of the Ti-DLC films increases obviously compared with the pure DLC films. In the meantime, the hardness of the Ti-DLC films increases first and then decreases with the increase of the Titarget sputtering current and reaches the highest when Ti target sputtering current is increased to 1.5A. Film-substrate cohesion and fracture toughness of the films are improved by depositing some Ti. The friction coefficient of DLC films decreases significantly with the deposition of Ti. |
| |
| Keywords: | unbalanced magnetron sputtering Ti-DLC cohesion tribological and wear properties |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《表面技术》浏览原始摘要信息 |
|
点击此处可从《表面技术》下载全文 |
|
