溶胶-凝胶法制备二氧化硅无机膜的工艺研究

以正硅酸乙酯为原料, 乙醇为溶剂, 盐酸为催化剂, N, N -二甲基酰胺为模板剂, 采用溶胶-凝胶工 艺在Al2O3 基体上制备SiO2 无机膜。考察了涂膜方式、溶胶的醇硅物质的量比及停放时间对膜性能的影响。结果 表明, 采用浓稀结合的方式涂膜可提高制膜效率及膜的性能;较大的醇硅物质的量比虽然可以获得较好的膜, 但制 膜周期较长;溶胶停放时间过长, 会使膜的性能下降。

Technology Study on SiO2 Inorganic Membranes Prepared by Sol-Gel Method

SiO₂ inorganic membranes were prepared on Al₂O₃ wafer substrates by Sol-Gel method using TEOS as raw material,alcohol as solvent，hydrochloric acid as catalyst and N,N-dimethylform amide as template.The effect of coating method,alcohol-silicon molar ratio of sol and retention time on performance of the sol were systematically analyzed. The results show that using combination of concentrated-dilute coating method can improve coating efficiency and performance of the membranes. Though larger alcohol-silicon molar ratio can get better membranes,the cycle of membranes preparation is longer. Retention time of the sol is too long, so that performance of the membranes will decrease.