Characterization of the Ultrathin HfO2 and Hf-Silicate Films Grown by Atomic Layer Deposition

The physical properties of HfO₂ and Hf-silicate layers grown by the atomic layer chemical vapor deposition are characterized as a function of the Hf concentration and the annealing temperature. The peaks of Fourier transform infrared spectra at 960, 900, and 820 cm_-1 originate from Hf-O-Si chemical bonds, revealing that a Hf-silicate interfacial layer began to form at the HfO₂/SiO ₂ interface after post deposition annealing process at 600 degC for 1 min. Moreover, the intensity of the peak at 750 cm^-1 can indicate the degree of crystallization of HfO₂. The formed Hf-silicate layer between HfO² and SiO² is also confirmed by X-ray photoelectron spectroscopy