微通道板腐蚀工艺研究

根据微通道板芯皮料玻璃的性质,选择了腐蚀工艺的腐蚀液,即HCl和NaOH溶液.利用真空压差法和显微镜形貌分析法,检测和分析了微通道板腐蚀工艺中通道的腐蚀进程.在腐蚀过程中,利用测量微通道板质量损失法衡量了腐蚀的程度,并检查了腐蚀效果.依据实验结果分析,提出了有效的微通道板酸-碱-酸交替腐蚀工艺以及具体的工艺参数.采用此工艺,可使芯料和芯皮料扩散层被完全腐蚀,同时避免了皮料被腐蚀,得到了光滑的通道壁,形成稳定的二次电子发射层.

Study on Microchannel Plate Etching Technique

According to characteristics of core and clad glass material of microchannel plate(MCP),the kind of etch liquid(HCl and NaOH liquid) in the process of etching microchannel plate(MCP) was chosen.By the vacuum presses difference method and microscopic appearance,the channel etched progress of MCP was analyzed and examined in the etching process.Making use of measuring the mass decrease of MCP in the etching process,the etching degree and result were measured and examined.According to analyzing experiment result,the effective etching technical(sour-alkali-sour)and technological parameter were provided.The core and core-clad spreading layer glass were etching completely,and the clad glass was protected.The results show that the smooth channel and stable double electron emissive layer were became.