Electrical and optical properties of ZnO:Al thin films grown by magnetron sputtering |
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Authors: | Shr-Nan Bai Tseung-Yuen Tseng |
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Affiliation: | (1) Department of Electronic Engineering, Institute of Electronic, Chienkuo Technology University, Changhua City, 500, Taiwan, ROC;(2) Department of Electronics Engineering, Institute of Electronics, National Chiao-Tung University, Hsinchu City, 300, Taiwan, ROC |
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Abstract: | The properties of transparent conductive ZnO:Al thin films grown by R.F. magnetron sputtering method are investigated. The
working pressure (argon gas) is changed from 2.5 to 40.0 mTorr to study its influence on the characteristics of ZnO:Al thin
films. The ZnO:Al thin films have better texture due to the increase in the surface mobility, which resulted from the increase
in the mean free path of sputtering gas under lower working pressure. The microstructure of ZnO:Al films is found to be affected
obviously by changing the working pressure. It is shown that the grain size of ZnO:Al thin films decreases with the increase
of working pressure. The X-ray diffraction patterns indicate that the poor crystallized structure of ZnO:Al films is obtained
at higher working pressure. Except 40 mTorr, the highly (002)-oriented ZnO:Al thin films can be found at the measured range
of working pressure. Moreover, the growth rate of the films decreases from 1.5 to 0.5 nm/min as the working pressure increases
from 2.5 to 40.0 mTorr. The results of optical transmittance measurement of ZnO:Al thin films reveal a high transmittance
(>80%) in visible region and exhibit a sharp absorption edge at wavelength about 350 nm. |
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