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16K CMOS/SOS asynchronous static RAM |
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| Abstract: | A new CMOS/SOS `buried-contact' process allows fabrication of dense static memory cells. The technology is applied in a 16K RAM with 1150 /spl mu/m/SUP 2/ (1.78 mil/SUP 2/) cells based on 5 /spl mu/m design rules. |
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