Tin-doping ofn
+ InP OMVPE layers |
| |
Authors: | A R Clawson C M Hanson |
| |
Affiliation: | (1) Naval Ocean Systems Center, 95152-5000 San Diego, CA;(2) Present address: Department of Electrical and Computer Engineering, University of California, San Diego, 92093-0407 La Jolla, CA |
| |
Abstract: | Tin as a donor dopant in OMVPE epilayers of InP has been studied for its dependence on growth parameters to assess the nature
of the dopant incorporation from a tetraethyltin (TESn) source and to establish reproducible conditions for tailoring carrier
concentrations. Free carrier concentrations depend linearly on Sn/In ratio and are independent of PH3 concentration consistent with the impurity incorporation on In-lattice sites. The carrier concentration saturates at 3 ×
1019 cm3 and is accompanied by excess Sn accumulation on the layer surface. X-ray diffraction shows an expansion of the lattice proportional
both to the measured free carrier concentration and to the TESn gas concentration up to solid saturation. The lattice expansion
is larger than expected from Sn for In radius substitution. SIMS profiles for abrupt turn-on and turn-off of the dopant source
show transient changes of Sn concentration consistent with a Sn surface layer buildup. |
| |
Keywords: | n-Type InP OMVPE Sn-doped InP |
本文献已被 SpringerLink 等数据库收录! |
|