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用QCM分析ZnO纳米线在湿度检测中的响应
引用本文:吕家云,张健,周晓峰.用QCM分析ZnO纳米线在湿度检测中的响应[J].压电与声光,2008,30(5).
作者姓名:吕家云  张健  周晓峰
作者单位:1. 巢湖学院,物理系,安徽,巢湖,238000
2. 华东师范大学,电子科学技术系,上海,200062
基金项目:上海市浦江人才计划基金,传感器国家重点实验室开放基金
摘    要:研究石英晶体微天平传感器上涂敷纳米ZnO膜,实现对湿度检测。实际测试结果涂敷纳米ZnO膜的石英晶体传感器在一定湿度范围的输出频率随测试的相对湿度变化。研究结果表明在湿度检测中,相对湿度越高,响应时间越长;涂敷膜越厚,频率变化越大,在相同的湿度下(高湿度)响应时间越长。

关 键 词:石英晶体微天平  纳米ZnO  相对湿度  响应时间

The Response of the Nanostructured ZnO to the Relative Humidity Based on QCM
LV Jia-yun,ZHANG Jian,ZHOU Xiao-feng.The Response of the Nanostructured ZnO to the Relative Humidity Based on QCM[J].Piezoelectrics & Acoustooptics,2008,30(5).
Authors:LV Jia-yun  ZHANG Jian  ZHOU Xiao-feng
Abstract:This paper describes a research of quartz crystal microbalances(QCM) coated with nanocrystalline ZnO used as relative humidity sensors.Sensing experiments were examined by measuring the resonance frequency shift of QCM which due to the additional mass loading when the QCM in the different relative humidity atmosphere.The results showed that the higher relative humidity,the longer the response time,and in the same high relative humidity,the more ZnO is coated,the longer response time is.
Keywords:quartz crystal microbalance  nanostructured zinc oxide  relative humidity  response time
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