| 磁控溅射TiN/Cu-Zn纳米多层膜腐蚀和抗菌性能研究 |
| |
| 引用本文： | 韦春贝,巩春志,田修波,杨士勤.磁控溅射TiN/Cu-Zn纳米多层膜腐蚀和抗菌性能研究[J].真空科学与技术学报,2010,30(1). |
| |
| 作者姓名： | 韦春贝 巩春志 田修波 杨士勤 |
| |
| 作者单位： | 哈尔滨工业大学材料科学与工程学院现代焊接生产技术国家重点实验实,哈尔滨,150001 |
| |
| 基金项目： | 国家自然科学基金，新世纪优秀人才计划，哈尔滨市科技创新人才专项基金 |
| |
| 摘 要： | 采用双靶磁控溅射的方法在不锈钢表面沉积了TiN/Cu-Zn纳米多层膜,研究了多层结构对膜层耐腐蚀性能和抗菌性能的影响,以及表面腐蚀与抗菌的关系。结果表明,Cu-Zn层比较薄时,膜层的耐腐蚀性能比较好,随着Cu-Zn层厚度的增加耐腐蚀性能显著下降。Cu-Zn层薄时,膜层抗菌性能对TiN层厚度较为敏感;而当Cu-Zn层较厚时,抗菌性能对TiN层厚度不敏感,均具有较好的抗菌性能。存在合适的多层结构,如TiN层厚度为3.3~5nm左右,Cu-Zn层厚度约为4nm时,使得膜层具有良好的抗菌性能和耐腐蚀性能。
|
| 关 键 词： | 磁控溅射 TiN/Cu-Zn多层膜 腐蚀 抗菌性能 |
Corrosion and Antibiotic Properties of Magnetron Sputtered TiN/Cu-Zn Nanomultilayers |
| |
| Wei Chunbei,Gong Chunzhi,Tian Xiubo,Yang Shiqin.Corrosion and Antibiotic Properties of Magnetron Sputtered TiN/Cu-Zn Nanomultilayers[J].JOurnal of Vacuum Science and Technology,2010,30(1). |
| |
| Authors: | Wei Chunbei Gong Chunzhi Tian Xiubo Yang Shiqin |
| |
| Affiliation: | Wei Chunbei,Gong Chunzhi,Tian Xiubo,Yang Shiqin(State Key Laboratory of Advanced Welding Production , Technology,School of MaterialsScience , Engineering,Harbin Institute of Technology,Harbin 150001,China) |
| |
| Abstract: | The TiN/Cu-Zn nano-multilayers with different modulation periods were deposited by magnetron sputtering of dual targets of titanium and brass on stainless steel substrates.The influence of the multilayer growth conditions,such as the modulation period,deposition rate and sputtering power,on the mechanical and antibiotic properties was studied.The cross-sectional microstructures of the multi-layers were characterized with scanning electron microscopy(SEM).The results show that the Cu-Zn layer thickness signi... |
| |
| Keywords: | Magnetron sputtering TiN/Cu-Zn multilayers Corrosion Antibacterial properties |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
