| 蒙特卡罗模拟在单颗粒扫描电镜-能谱定量分析中的应用研究 |
| |
| 引用本文： | 朱继浩,初凤友,耿红.蒙特卡罗模拟在单颗粒扫描电镜-能谱定量分析中的应用研究[J].电子显微学报,2012,31(1):30-35. |
| |
| 作者姓名： | 朱继浩 初凤友 耿红 |
| |
| 作者单位： | 1. 国家海洋局第二海洋研究所国家海洋局海底科学重点实验室,浙江杭州,310012
2. 山西大学环境科学与工程研究中心,山西太原,030006 |
| |
| 基金项目： | 国家自然科学基金青年基金资助项目（No.41106051）; 国家海洋局青年海洋科学基金资助项目（1085-10）;国家海洋局第二海洋研究所基本科研业务费专项资助项目（JG0902）; 海洋公益性行业科研专项资助项目（201005003） |
| |
| 摘 要： | 使用扫描电镜-能谱分析技术在10kV/1nA条件下分别对微束分析国家标准样品、K411玻璃微球和自制的颗粒标准样品进行了测试,并用CASINO程序对其进行了元素定量计算,以检验蒙特卡罗模拟在单颗粒分析中的适用性。研究结果表明:(1)无论是块状还是颗粒标准样品,CASINO程序给出的定量计算结果总体上都明显优于能谱仪自带的XPP程序;(2)相比归一化法,CASINO程序能显著地校正颗粒效应;(3)对于Cu、Zn等KαX射线荧光产额较低的元素,在其含量较低时最好使用Lα线进行定量计算;(4)对于Cr2O3等存在严重谱线重叠的样品,进行相应的重叠校正也可得到较为准确的定量计算结果。
|
| 关 键 词： | 扫描电镜-能谱 蒙特卡罗模拟 单颗粒 定量分析 |
Research on the application of Monte Carlo simulation in single particle SEM-EDS quantitative analysis |
| |
| ZHU Ji-hao
,
CHU Feng-you
,
GENG Hong.Research on the application of Monte Carlo simulation in single particle SEM-EDS quantitative analysis[J].Journal of Chinese Electron Microscopy Society,2012,31(1):30-35. |
| |
| Authors: | ZHU Ji-hao CHU Feng-you GENG Hong |
| |
| Affiliation: | 1.Key Laboratory of Submarine Geosciences of State Oceanic Administration,Second Institute of Oceanography, State Oceanic Administration,Hangzhou Zhejiang 310012;2.Research Center of Environmental Science and Engineering, Shanxi University,Taiyuan Shanxi 030006,China) |
| |
| Abstract: | To verify the availability of Monte Carlo simulation in the single particle SEM-EDS quantitative analysis,we measured a large number of national reference materials for micro-beam analysis,K411 glass microsphere,and self-prepared particle standard samples in the conditions of 10kV/1nA,and calculated their elemental composition using CASINO program.The results revealed that CASINO program provided more accurate and reliable data relative to XPP program on the whole,for both bulk and particle standard samples.Compared with normalization method,CASINO program can correct the particle effects significantly.Because of their lower Kα X-ray fluorescence yield,it＇s better to use Lα line instead of Kα line to quantify the elements such as copper and zinc.If appropriate spectral overlapping correction is applied,CASINO program can also provide accurate data for samples such as TiN and Cr2O3. |
| |
| Keywords: | SEM-EDS monte carlo simulation single particle quantitative analysis |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
