| 离子束减薄对金属玻璃电镜样品的非均匀刻蚀 |
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| 引用本文： | 邓静伟,吴波,隋曼龄.离子束减薄对金属玻璃电镜样品的非均匀刻蚀[J].电子显微学报,2012,31(3):197-201. |
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| 作者姓名： | 邓静伟 吴波 隋曼龄 |
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| 作者单位： | 1. 中国科学院金属研究所沈阳材料科学国家(联合)实验室,辽宁沈阳,110016
2. 北京工业大学固体微结构与性能研究所,北京,100124 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 本文利用透射电子显微镜和原子力显微镜研究了金属玻璃样品在离子束作用后形成的厚度起伏特征。采用高分辨透射电镜和能谱分析结果表明金属玻璃样品中没有发生明显的结构和成分的变化。利用离子束与样品表面作用过程的粗化机理解释了出现这种特征厚度起伏的原因。这种厚度起伏是由材料本身性质和实验条件共同决定的。通过研究离子束与样品的作用方式,有利于确定合适的透射电镜样品制备方法,有助于利用透射电镜研究非晶样品的微观结构。
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| 关 键 词： | 金属玻璃 电子显微镜 样品制备 离子减薄 原子力显微镜 |
Inhomogeneous etching of bulk metallic glass samples during ion milling |
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| DENG Jing-wei
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WU Bo
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SUI Man-ling.Inhomogeneous etching of bulk metallic glass samples during ion milling[J].Journal of Chinese Electron Microscopy Society,2012,31(3):197-201. |
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| Authors: | DENG Jing-wei WU Bo SUI Man-ling |
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| Affiliation: | 1. Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences Shenyang Liaoning 110016; 2. Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing 100124, China) |
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| Abstract: | Thickness variation in bulk metallic glass （BMG） specimens prepared by ion milling was studied by transmission electron microscopy （TEM） and atomic force microscopy （AFM）. High resolution TEM and X-ray energy dispersive spectrometry results indicate no significant structure or composition changes in the specimens. The formation of these thickness patterns was interpretted by a roughening mechanism duing ion milling. The understanding of this inhomogeneous etching in BMG specimens during ion milling will help to achieve reliable BMG specimen preparation, which is critical for TEM study on BMG materials. |
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| Keywords: | bulk metallic glass transmission electron microscopy specimen preparation ion milling atomic force microscopy |
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