溶胶-凝胶法制备ZnO:Al透明导电膜正交试验的灰色关联分析

介绍了灰色关联分析的模型和算法,并运用灰色关联分析结合正交试验的方法对溶胶-凝胶法制备ZnO:Al透明导电膜过程中的溶胶浓度、掺杂量、镀膜层数、退火温度四个关键工艺因素对薄膜电性能的影响程度进行了研究,得出退火温度对膜的电性能的影响最为重要,其次是掺杂浓度和镀膜层数,溶胶浓度的影响最小。

Grey correlation matrix analysis for orthogonal test of preparing ZnO:Al transparent conducting films by Sol-gel method

The model and algorithm of grey correlation matrix analysis were introduced in this paper. The effect of sol concentration, doping quantity, plating layers and annealing temperature on the film electrical property were investigated by using grey correlation matrix analysis and orthogonal test. The results showed that the annealing temperature is the key factor that affects film electrical property, the effects of doping quantity and plating layers are secondary and sol concentration is the footy factor.