Effects of sputtering atmosphere on the properties of c-plane ScAlN thin films prepared on sapphire substrate |
| |
Authors: | Yao Zhang Weixin Zhu Dong Zhou Yixi Yang Chengtao Yang |
| |
Affiliation: | 1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, China
|
| |
Abstract: | |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|