Laser pulsing of field evaporation in atom probe tomography |
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| Affiliation: | 1. CAMECA Instruments, Inc., 5500 Nobel Drive, Madison, WI 53711, USA;2. Groupe de Physique des Materiaux, UMR CNRS 6634 – UFR Sciences Site du Madrillet, Avenue de l’Université, B.P. 12, 76801 Saint Etienne Du Rouvray Cedex, France;3. Instituut voor Kern-en Stralingsfysika, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium;4. IMEC, Kapeldreef 75, B-3000 Leuven, Belgium;1. School of Nuclear Engineering, Purdue University, West Lafayette, IN 47907, USA;2. School of Materials Engineering, Purdue University, West Lafayette, IN 47907, USA;3. Advanced Cooling Technologies, Inc., 1046 New Holland Avenue, Lancaster, PA 17601, USA;4. Bremen Institute of Mechanical Engineering, University Bremen, 28359 Bremen, Germany;1. Department of Materials Science and Engineering (MSE), Pohang University of Science and Technology (POSTECH), Pohang 790-784, Republic of Korea;2. Semiconductor Business, Samsung Electronics, Hwasung 445-701, Republic of Korea;3. National Institute for Nanomaterials Technology (NINT), Pohang University of Science and Technology (POSTECH), Pohang 790-784, Republic of Korea;1. School of Aerospace, Mechanical, Mechatronic Engineering, The University of Sydney, NSW 2006, Australia;2. Australian Centre for Microscopy and Microanalysis, The University of Sydney, NSW 2006, Australia;3. Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK;4. School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia;1. CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France;2. Groupe de Physique des Matériaux, UMR 6634 CNRS—Université de Rouen, BP 12, 76801 Saint Etienne du Rouvray Cedex, France;1. Department of Physical Metallurgy and Materials Testing, Montanuniversität Leoben, Franz-Josef Straße 18, 8700 Leoben, Austria;2. AMETEK B. V., EDAX business unit, PO Box 4144, 5004JC Tilburg, The Netherlands |
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| Abstract: | The processes by which field evaporation in an atom probe is momentarily stimulated by impingement of a laser beam on a specimen are considered. For metals, the dominant and perhaps only sensible mechanism is energy absorption leading to thermal pulsing, which has been well established. The energy of a laser beam is absorbed in a thin optical skin depth on the surface of the specimen. For materials with a band gap such as semiconductors and dielectrics, it is found that energy absorption in a thin surface layer dominates the process as well and leads to similar thermal pulsing. The relative amount of surface absorption versus volume absorption can strongly influence the heat flow and therefore the mass spectrum of the specimen. Thus it appears for very different reasons that all materials behave similarly in response to laser pulsing in atom probe tomography. |
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| Keywords: | Atom probe tomography Laser pulsing Field evaporation |
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