| 光谱法测试计量光栅参数 |
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| 引用本文： | 谢红,曹向群.光谱法测试计量光栅参数[J].浙江大学学报(自然科学版 ),1991,25(5):570-576. |
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| 作者姓名： | 谢红 曹向群 |
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| 作者单位： | 浙江大学光仪系
(谢红)，浙江大学光仪系(曹向群) |
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| 摘 要： | 本文阐述光谱法测试计量光栅参数的方法,借助于测量计量光栅的功率谱强度及其相应量来推算光栅的栅距,振幅透过率分布及光栅开口比等一些光栅元件的重要参数,为研究光栅质量提供了部分依据。
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| 关 键 词： | 光谱法 测量 莫尔测试 计量光栅 |
The spectrum testing of the metrology grating |
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| Xie Hong Cao Xiangqun.The spectrum testing of the metrology grating[J].Journal of Zhejiang University(Engineering Science),1991,25(5):570-576. |
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| Authors: | Xie Hong Cao Xiangqun |
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| Affiliation: | Dept. of Optical Instrument Engineetins |
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| Abstract: | The method for testing annd studying the grating spectrum is described. For the tested gratings, We can calculate their grating pitch, amplitude- transmission distribution,space and pitch rate, etc. through testing spectrum intensity and its position distribution of metrology gratings, and so some features of main parameters of grating elements are studied. |
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| Keywords: | grating testing |
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