基于多层硅模具的Zr基非晶合金双层微小齿轮制备工艺研究

应用分层设计与制备工艺得到了具有微小多层型腔的复杂硅模具,采用坯料直径为3mm的Zr41.2Ti13.8Cu12.5Ni10Be22.5非晶合金为实验材料,使用自行设计的实验平台,对双层微小齿轮（大齿轮模数0.05mm,齿数36,厚度150μm;小齿轮模数0.05mm,齿数30,厚度150μm;中心轴孔直径0.8mm)进行了超塑性成形工艺研究,优化了零件成形、腐蚀脱模、飞边去除及质量分析的工艺流程。结果表明,该工艺流程合理可靠,制备出的Zr基双层微小齿轮保持了非晶态结构、形状完整、充型率高、表面质量良好。

Investigation on Preparation Process of Zr-based Bulk Metallic Glass Micro Bilayer Gear Based on Multilayer Silicon Mold

The preparation process of Zr-based bulk metallic glass micro bilayer gear was investigated, where the multilayer silicon mold was prepared according to the multilayer design pattern. The technologies of superplastic micro-forming, mold unloading, overlap cutting and quality analyzing were optimized. Then, the Zr41.2Ti13.8Cu12.5 Ni10Be22.5 gear with 3mm diameter was obtained by the self-design experimental platform,a big gear layer was with 0.05 module, 36 teeth and 150μm thickness, small gear layer was with 0.05 module, 32 teeth and 150μm thickness, the center axle hols was with 0.8mm diameter. The results show that the gear  has complete shape, high filling rate and good surface quality, while its material maintaines amorphous.