在二氧化硅衬底上制备磁光Ce：YIG薄膜用于磁光波导型器件

对Ce1YIG磁光薄膜的制备过程及磁光性能进行了详细的研究．用RF磁控溅射法在二氧化硅的基片．上淀积Ce1YIG薄膜，再对此薄膜进行晶化处理，以得到具有磁光性能的Ce1YIG薄膜．本文讨论了晶化过程中，Ce1YIG薄膜微观结构的变化对其磁光性能的影响．结果表明：采用波长为630nm的可见光测量，薄膜的饱和法拉第旋转系数θF为0．8deg／μm．同时，晶化薄膜易磁化方向为平行于膜面方向，其居里温度点为220℃．所得Ge1YIG薄膜的参数表明：所制备的薄膜适宜于制备波导型磁光隔离器．

MAKING MAGNETO-OPTIC CE-SUBSTITUTED YIG THIN FILMS ON AMORPHOUS SILICA SUBSTRATE

The preparation and magneto-optic properties of YIG thin films were investigated. Ce-substituted yttriumiron garnet(Ce 1YIG) thin films were grown on an amorphous silica substrate by RF magnetron sputtering method. Then the as-grown amorphous Ce 1YIG thin films were annealing in different ambient gas to obtain the crystallized film with magneto-optic effect. The post annealing process was investigated in detail, and the influence of microstructure of films on magntooptic properties was discussed. The results show that the saturation Faraday rotation coefficient θ F of about 0.8deg/μm was obtained for light at a wavelength of 630 nm, and the strong in-plane magnetization was observed. The curie temperature is 220℃ measured by VSM at atmosphere. All these parameters show that Ce∶YIG thin film prepared is suitable for fabrication of magnetooptic waveguide isolator.