金属薄膜结合性能的评价方法研究

针对Al2O3基体上磁控溅射沉积的Au／NiCr／Ta多层金属薄膜，用压痕法、滚动接触疲劳法、摩擦力和声发射两种模式同时监测的划痕法，对比研究了金属薄膜与基体的结合性能。结果表明：压痕试验从压痕形貌上很难判断薄膜与基体是否发生剥离，压入过程中也没有诱发裂纹的产生，更无法分辨薄膜层间的分离；由于金属薄膜的塑性变形，滚动接触疲劳法很难应用于金属薄膜结合性能的表征：划痕法可应用于多层金属薄膜的特异划擦行为研究，其中摩擦力模式能反映压头进入不同金属膜层时的变化，层间声发射信号的灵敏度不如摩擦力信号，对应试验条件，摩擦力曲线存在若干以拐点为特征的载荷，摩擦力曲线上出现的拐点及拐点特征载荷值可以在一定程度上反映多层膜的层数和层厚，并可刻划出该膜／基体系承受压入载荷而不发生剥落的能力。

Evaluation Methods on Adhesion Property of Metallic Films

The adhesion property of Au/NiCr/Ta multi-layered metallic films was investigated by the indentation method, rolling contact fatigue method and scratch method with both friction and acoustic emission modes. The results indicate that the indentation method can not distinguish if the failure happens between the metallic film and substrate and there are no cracks during the indentation process; and the rolling contact fatigue method can not be used to evaluate the adhesion property for metallic films due to the plastic deformation; only the scratch method can eventually be used to distinguish the special scratch behavior for multi-layered metallic films. Additionally, the friction mode can reflect the changes on different metallic film layers, it is more sensitive than the acoustic emission in the same layer. The number of layers and the layer thickness of film and the scratch resistance of metallic films can be reflected by a critical characteristic load at a certain extent.