| 多组分掺杂ZnO陶瓷薄膜的射频磁控溅射法制备及表征 |
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| 引用本文： | 花银群,孙真真,陈瑞芳,徐瑞丽.多组分掺杂ZnO陶瓷薄膜的射频磁控溅射法制备及表征[J].功能材料,2011,42(3):444-447. |
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| 作者姓名： | 花银群 孙真真 陈瑞芳 徐瑞丽 |
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| 作者单位： | 江苏大学机械工程学院; |
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| 基金项目： | 国家自然科学基金资助项目(50451004) |
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| 摘 要： | 采用传统陶瓷烧结工艺,制备了直径为50mm,厚度为3 mm的Bi2O3、Sb2O3、CO2O3、Cr2O3、MnO2掺杂的ZnO陶瓷靶,采用所制备的ZnO陶瓷靶和射频磁控溅射技术在Si(111)衬底上成功制备出了ZnO陶瓷薄膜,并研究了溅射功率和退火温度对ZnO陶瓷薄膜的微观结构和表面形貌的影响.结果表明:随着溅射功率...
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| 关 键 词： | 无机非金属材料 ZnO陶瓷薄膜 射频磁控溅射 溅射功率 退火温度 |
Preparation and characterization of(Bi,Sb,Co,Cr,Mn)-doped ZnO ceramic films grown by the RF magnetron sputtering |
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| HUA Yin-qun,SUN Zhen-zhen,CHEN Rui-fang,XU Rui-li.Preparation and characterization of(Bi,Sb,Co,Cr,Mn)-doped ZnO ceramic films grown by the RF magnetron sputtering[J].Journal of Functional Materials,2011,42(3):444-447. |
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| Authors: | HUA Yin-qun SUN Zhen-zhen CHEN Rui-fang XU Rui-li |
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| Affiliation: | HUA Yin-qun,SUN Zhen-zhen,CHEN Rui-fang,XU Rui-li(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China) |
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| Abstract: | (Bi,Sb,Co,Cr,Mn)-doped ZnO ceramic targets with 50mm in diameter and 3mm in depth were prepared by the traditional solid-state sintering process.ZnO ceramic films were deposited on Si(111) substrate by RF magnetron sputtering using(Bi,Sb,Co,Cr,Mn)-doped ZnO ceramic target.The effects of both sputtering power and annealing temperature on the microstructure and surface morphology of ZnO films were investigated.The results show that with the increase of the sputtering power,the growth rate of the ZnO ceramic f... |
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| Keywords: | inorganic non-metallic materials ZnO ceramic films RF magnetron sputtering sputtering power annealing temperature |
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