Ultra high aspect-ratio MEMS and NEMS on basis of fibrous composite technology

Indisputably, microelectronics is the mother of the MEMS/NEMS technologies. Unfortunately, the majority of developed MEMS and NEMS devices inherited from microelectronics technologies not only of merit but also deficiencies one of which is their planarity. Recently developed devices on the flexible base and also devices with the moving elements on the hinges, in principle, remain geometrically flat. With this micro- and nano-mechanisms (motors, actuators, sensors, etc.) they are not divided with the base (from silicon or another material) large part of which (volume and mass) functionally is not used and has usual of macro sizes (dimensions of a chip). As a result, these ultra modern planar technologies are helpless with the creation of powerful autonomous 3D-devices with the overall sizes ∼(1–10) mm³. The author makes the attempt to estimate the prospects for development and fabrication of topology complex 3D MEMS/NEMS, for example, flaying microrobot and elastic micro motor on the basis of fibrous composites—ultra high aspect-ratio glass structures with predetermined 3D micro- and nano-topologies and embedded wires.