新型MEMS热流陀螺的制造

MEMS热流陀螺是一种基于热流体理论的新型陀螺.该器件利用封闭腔体内的气体作为敏感元件,代替了常规MEMS陀螺的复杂振动结构和悬挂质量块,具有抗大冲击、体积小、重量轻、成本低、可批量化生产等优点.本研究的目的是为了验证MEMS热流陀螺的可行性,主要介绍该器件的研制过程,包括流体场仿真和工艺实现.最后得到了MEMS热流陀螺及其输出曲线,测试结果很好地验证了基于热流体理论的MEMS热流陀螺的可行性.

Fabrication of Novel MEMS Convective Gyroscope

The Convective gyroscope described in the article is a kind of novel MEMS device. The operation of the gyroscope is based on free convection of a tiny hot gas bubble in an enclosed chamber. The sensing element of this device is gas. So it does not require a solid proof mass and it is compact, lightweight, inexpensive to manufacture. In order to verify feasibility of the convective gyroscope research was developed .In the article the fabrication process is introduced, including the simulation of liquid and the process. Finally, the devices are fabricated with a fine test result, so the feasibility of the MEMS gyroscope is verified.