固着磨料加工碳化硅反射镜的初步实验研究

本文采用了一种有别于传统的加工碳化硅反射镜的工艺---固着磨料加工工艺。此工艺不但可以利用大颗粒金刚石磨料快速加工出较好的镜面质量，而且由于其固着磨料与工件相对运动关系固定，有利于精确加工。在工艺实验中，分别测得了W7,W5,W3.5,W1.5固着磨料丸片在特定转速和压力下对碳化硅材料的去除特性。通过多组去除量曲线，我们得出此工艺不仅有着较高的去除率，而且其稳定性非常良好。另外在表面粗糙度结果方面，最初使用W7丸片获得了粗糙度为42.758nm rms的镜面。我们不断减小所用丸片的粒度，工件表面粗糙度随之减小。在使用W1.5丸片抛光后，最终获得了粗糙度为1.591nm rms的光滑镜面。实验结果表明，固着磨料加工碳化硅反射镜工艺在某些加工阶段内可以取代传统的散粒磨料加工工艺，有着良好的应用前景。

Study on experiment of grinding SiC mirror with fixed abrasive

We have taken a brand new technics for manufacturing SiC reflecting mirror which is different from the traditional method, it is called as fixed abrasive surfacing technics. Not only the new method achieves better mirror quality with bigger diamond in diameter quickly , but also because of the fixed motion between the abrasive and workpiece and it will be good for surface finishing. In the experiment, material removal characteristic which is on SiC under certain rotation speed and pressure by W7,W5,W3.5,W1.5 pellets has been tested. Through those removal curves, we come to a conclusion that the technics not only has a higher removal rate, but also has much more stability. In addition, the surface roughness experiment is mentioned. In the first beginning , we achieved a mirror whose surface roughness is 42.758nm rms with W7 pellets. The surface roughness is descending as we change pellets with smaller diamond in diameter . At the end of experiment , a smooth surface whose roughness is 1.591nm rms has been achieved after using W1.5 pellets. The results of the experiment indicate that the technics which manufactures SiC reflecting mirror with fixed abrasive is able to replace the traditional slurry abrasive completely in certain finishing phase and also has a great foreground in application..