| 反应性离化团束制备光学薄膜新技术 |
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| 引用本文： | 林开华,郑宣明. 反应性离化团束制备光学薄膜新技术[J]. 光学精密工程, 1991, 0(5): 14-20 |
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| 作者姓名： | 林开华 郑宣明 |
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| 摘 要： | 本文叙述了离化团束淀积光学薄膜的基本概念及特性,研制了离化团束淀积光学薄膜装置,开展了光学薄膜晶体结构与性能关系的研究。所研制的光学薄膜的牢固性相当好。基底不加温就可以得到ZnS、MgF2的硬膜。反应性离化团束淀积的ZnO光学薄膜具有优良的织构,SiO2光学薄膜呈现多晶结构。
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Reactive Ionized-cluster Beam Technique for Optical Films Deposition |
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| Lin Kaihua,Zheng Xuanming. Reactive Ionized-cluster Beam Technique for Optical Films Deposition[J]. Optics and Precision Engineering, 1991, 0(5): 14-20 |
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| Authors: | Lin Kaihua Zheng Xuanming |
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| Abstract: | The principle of the ionized-cluster beam(ICB) technique and the main characteristics of optical films deposited by ICB are described. ICB deposition apparatus has been fabricated. The films of ZnS and MgF2 at low substrate temperatures deposited by ICB become hard films. The optical film of ZnO has preferentical orientation. The optical film of SiO2 has polycrystalline strueture. |
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