| 准分子激光直接切割金刚石薄膜的技术研究 |
| |
| 引用本文： | 赵方海,任临福.准分子激光直接切割金刚石薄膜的技术研究[J].微细加工技术,1994(2):66-68. |
| |
| 作者姓名： | 赵方海 任临福 |
| |
| 作者单位： | 吉林大学电子工程系集成光电子学国家重点联合实验室 |
| |
| 摘 要： | 本文介绍了准分子激光切割金刚石薄膜的实验结果，给出了切割金刚石薄膜的光能量密度阀值，并对其结果进行了分析和讨论。
|
| 关 键 词： | 准分子激光 切割 金刚石薄膜 |
STADY ON TECHNIQUE OF DIRECTLY CUTTING DIAMOND FILM BY EXCIMER LASER |
| |
| Zhao Fangkai,Ren linfu,Wang Qingya,Ma Li,Zheng Wei and Zhang Yushu.STADY ON TECHNIQUE OF DIRECTLY CUTTING DIAMOND FILM BY EXCIMER LASER[J].Microfabrication Technology,1994(2):66-68. |
| |
| Authors: | Zhao Fangkai Ren linfu Wang Qingya Ma Li Zheng Wei and Zhang Yushu |
| |
| Abstract: | The experimental results of cutting diamond film by excimer laser are intreduced.The threshold of laser energy density of cutting diamond film is given and the results are discussed. |
| |
| Keywords: | excimer laser cutting diamond film |
| 本文献已被 CNKI 维普 等数据库收录！ |
