Stimulation of the diamond nucleation on silicon substrates with a layer of a polymeric precursor in deposition of diamond films by microwave plasma |
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| Authors: | V S Sedov V G Ral’chenko A A Khomich A I Sizov T M Zvukova V I Konov |
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| Affiliation: | 1.Prokhorov Institute of General Physics,Russian Academy of Sciences,Moscow,Russia;2.Chemical Department,Lomonosov Moscow State University,Moscow,Russia |
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| Abstract: | It has been shown that layers of a certain type of polymers applied to silicon substrates at the thermal destruction form
(in parallel with sp2 coordinated carbon) diamond nanoparticles, which act as nucleation centers of crystallites in the subsequent chemical vapor
deposition of diamond. Microcrystalline diamond films have been synthesized from methane-hydrogen mixtures by microwave plasma
using poly(naphthylhydrocarbyn) and poly(hydrocarbyn) preceramic polymers. |
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