Demonstration of robust micromachined jet technology and its application to realistic flow control problems |
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Authors: | Sung PB Chang |
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Affiliation: | 1. Department of Electronic and Electrical Engineering, Inha University, 253 Younghyun3-Dong, 402-751, Nam-Gu, Incheon, Korea
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Abstract: | This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors
and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication
technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids
problems, such as UAV (Unmanned Aerial Vehicle) -scale aerodynamic control. Approaches of this work include: (1) the development
of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined
structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic
substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale,
more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors
and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure
sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional
micromachining processes as fabrication technologies. |
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