SiC-SiO2 nanocomposite films prepared by laser CVD using tetraethyl orthosilicate and acetylene as precursors |
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Authors: | Shu Yu Rong Tu Takashi Goto |
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Affiliation: | a Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japanb State Key Laboratory for Powder Metallurgy, Central South University, Changsha, Hunan 410083, PR China |
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Abstract: | SiC-SiO2 nanocomposite films were prepared by laser chemical vapor deposition (LCVD) using a CO2 laser with tetraethyl orthosilicate (TEOS) and acetylene (C2H2) as precursors. The effects of laser power on the crystal phase and microstructure of the SiC-SiO2 nanocomposite films were investigated. Films produced with laser power below 150 W (below 1523 K) had an amorphous structure, while those produced above 200 W (above 1673 K) were a mixture of crystalline SiC and amorphous phase. At 245 W (1774 K) the film contained 3C-SiC nanocrystals 100 to 200 nm in diameter dispersed in an amorphous matrix having high-density stacking faults formed on the (1?1?1?) and (111?) planes. |
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Keywords: | Nanocomposites SiC-SiO2 Laser CVD Microstructure |
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