Low-damage dry-etched grating on an MQW active layer anddislocation-free InP regrowth for 1.55-μm complex-coupled DFB lasersfabrication |
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| Authors: | Talneau A. Bouadma N. Lebellego Y. Slempkes S. Ougazzaden A. Patriarche G. Sermage B. |
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| Affiliation: | CNET, Bagneux; |
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| Abstract: | A grating dry-etched through the upper wells of a multiquantum-well active layer has been characterized before and after regrowth. TEM observation and carrier lifetime measurements have shown growth-free defects of the epitaxial layers. As a consequence, quasi-100% monomode oscillation on λ+1 mode has been achieved on complex-coupled distributed-feedback GaInAsP QW lasers fabricated with such grating |
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