A rectilinear plasma filtering system for vacuum-arc deposition of diamond-like carbon coatings |
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| Affiliation: | 1. Christian Doppler Laboratory for Application Oriented Coating Development at the Institute of Materials Science and Technology, TU Wien, Vienna, Austria;2. Institute of Materials Science and Technology, TU Wien, Vienna, Austria;3. Plansee Composite Materials GmbH, Lechbruck am See, Germany;4. Oerlikon Balzers, Oerlikon Surface Solutions AG, Balzers, Liechtenstein;1. State Key Laboratory of Powder Metallurgy, Central South University, Changsha Hunan, 410083, China;2. Zhuzhou Cemented Carbide Cutting Tools Co., LTD, Zhuzhou Hunan, 412007, China;1. Université de Haute Alsace, Laboratoire Physique et Mécanique Textiles (EA 4365), F-68093 Mulhouse, France;2. Université de Franche-Comté, FEMTO-ST (UMR CNRS 6174), F-25211 Montbéliard, France;3. Université de Haute Alsace, Institut de Science des Matériaux de Mulhouse (UMR 7361 CNRS), F-68093 Mulhouse, France;4. Université de Strasbourg, Institut de Physique et Chimie des Matériaux de Strasbourg (UMR CNRS 7504), F-67087 Strasbourg, France;1. Mechanical Automotive and Materials Engineering Department, University of Windsor, Windsor, ON N9B3P4, Canada;2. Chemical Sciences and Materials Systems Laboratory, General Motors R&D Center, 30500 Mound Road, Warren, MI 48090-9055, USA |
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| Abstract: | A study of the operation of an electric-arc carbon-plasma source for DLC deposition with the use of a rectilinear filter has revealed that the operating efficiency of plasma flux passage through the filter is determined by the shape of the cathode used.It is demonstrated experimentally that the use of a shaped cathode makes it possible to increase the filter efficiency by no less than 20% compared with that for a standard cathode. The growth rate of a uniformly thick coating, attained during operation with a shaped cathode, was measured to be 3 μm h−1 on a diameter of 18 cm. These results are four times higher (in ion current value) and an order of magnitude greater (in the diameter of a uniformly thick coating) than the previous results obtained with a curvilinear filter. |
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