Properties of DLC films deposited by an oxyacetylene flame |
| |
| Affiliation: | 1. Departamento de Máquinas, Componentes e Sistemas Inteligentes, Faculdade de Engenharia Elétrica e de Computação, Universidade Estadual de Campinas, C.P. 6101, CEP 13081-970 Campinas-SP, Brazil;2. Departamento de F??sica e Qu??mica, Faculdade de Engenharia de Ilha Solteira, Universidade Estadual Paulista, C.P. 31, CEP 15385-000 Ilha Solteira-SP, Brazil;3. Departamento de Eletrônica Quantica, Instituto de F??sica Gleb Wataghin, Universidade Estadual de Campinas, C.P. 6165, CEP 13081-970 Campinas-SP, Brazil;1. Chair of Mechanical Design and Manufacturing, Brandenburg University of Technology Cottbus-Senftenbereg, Konrad-Wachsmann-Allee 17, Cottbus D-03046, Germany;2. National University of Science and Technology “MISiS”, Leninsky Ave. 4, 119049 Moscow, Russia;1. Brandenburg University of Technology Cottbus-Senftenbereg, Konrad-Wachsmann-Allee 17, Cottbus, D 03046, Germany;2. Access e.V., Intzestr. 5, 52072, Aachen, Germany;1. Metallurgical and Materials Engineering Program, Federal University of Rio de Janeiro (UFRJ), CEP 21941-972, Rio de Janeiro, RJ, Mailbox 68505, Brazil;2. Petróleo do Brasil S. A. (Petrobras), CEP 12223-900, São José dos Campos, SP, Brazil |
| |
| Abstract: | Diamond-like carbon (DLC) films were obtained by spinning a tungsten carbide substrate at a high speed using an oxyacetylene flame. The films deposited at a typical experimental condition of substrate temperature of 810°C, rotation of 600 rpm and 3 h deposition time, exhibited an uniform, very smooth, hard and glassy surface covering the entire exposed face of the substrate. These films were identified as DLC by their characteristic broad Raman spectra centered at 1554 cm?1 and micro-Vicker's hardness >3400 kg mm?2. For substrate temperatures <800°C the film started losing the uniform glassy surface and the hardness deteriorated. For temperatures >950°C the film was still hard and shiny, but black in color. DLC films were also obtained in a wide range of speeds of rotation (300–750 rpm), as long as the temperature remained close to 850°C. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
