Structure and properties of hard carbon films depending on heat treatment temperatures via polymer precursor |
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| Affiliation: | 1. College of Chemistry and Chemical Engineering, Chongqing University of Technology, 69 Hongguang Rd, Lijiatuo, Banan District, Chongqing 400054, PR China;2. Institute of Microstructure and Properties of Advanced Materials, Beijing University of Technology, Beijing 100124, PR China;3. School of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, PR China;4. College of Materials Science and Engineering, Chongqing University, Chongqing 400044, PR China;5. Jozef Stefan Institute, Jamova 39, Ljubliana SI-1000, Slovenia, EU;6. School of Chemistry, Physics and Mechanical Engineering, Queensland University of Technology, Brisbane, QLD 4000, Australia;7. CSIRO-QUT Joint Sustainable Processes and Devices Laboratory, Commonwealth Scientific and Industrial Research Organization, P.O. Box 218, Lindfield, NSW 2070, Australia |
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| Abstract: | Phenylcarbyne polymer films were coated on silicon substrates and heat treated in 1 atm pressure of argon at various temperatures. The structural changes occurring during the heat treatment process of the polymer were investigated by Raman spectroscopy and Fourier transform infrared (FTIR) spectroscopy. The Raman and FTIR spectra features of the polymer showed a dependence on the heat treatment temperatures. At low temperatures (below 400°C), the Raman and IR spectra of the polymer were similar to those of the original polymer. The hardness and Young's modulus of the polymer films were below 1 and 50 GPa, respectively. With increasing temperature (above 400°C), thermal decomposition of the polymer occurred, resulting in structural changes of the polymer from soft amorphous hydrocarbon (400–600°C) phases to hard carbon phases (above 600°C). The hardness and Young's modulus increased from 1.5 and 65 GPa at 600°C to 9 and 120 GPa at 1000°C, respectively. It is assumed that the hard carbon film converted from the polymer might contain sp2 and sp3 carbon phases; high temperature of heat treatment resulted in increasing sp2 (glassy) carbon phase in the films. |
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