Heat treatment of tetrahedral amorphous carbon films grown by filtered cathodic vacuum-arc technique |
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Affiliation: | 1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, PR China;2. University of Chinese Academy of Sciences, Beijing 100049, PR China |
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Abstract: | Tetrahedral amorphous carbon (ta-C) is a potential low-cost substitute for diamond in certain applications, but little is known of the temperature range over which its desirable properties are retained. The thermal stability of tetrahedral amorphous carbon (ta-C) films has been investigated by heat treatment of the films at temperatures from room temperature to 450°C in high vacuum, low vacuum and oxygen ambient. It was found that heat treatment in oxygen ambient leads to a much more prominent variation in film thickness, stress and hardness than in both low and high vacuum. Raman studies also show an increase of the G-band frequency to higher values, an increase of the integrated intensity ratio and a narrowing of the G bands for films annealed in oxygen ambient with increasing temperature. By contrast, ta-C films exhibit a high resistance to degradation during treatment in low and high vacuum. They sustain their structure, thickness, stress and hardness for temperatures up to 400°C. |
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